Component information
Deposition source cells ELC-3000
Overview
- This line cell is ideal for equipment for continuous film formation system such as roll coater, inline-type system, etc.
- The capacity of crucible and width of cell can be manufactured in accordance with the system.
Product specifications
1.Maximum heating temperature: 1300oC
2.Measuring element: WRe (5-26) thermocouple
3.Crucible capacity: 100 to 600 cc
4.Heater: Ta heater (Ribbon-type)
5.Crucible material: PBN (Pyrolytic Boron Nitride)
6.Mounting: Stationary type (flange mounting type available)
