Component information

Ionization Cell   MC-300i


1. As evaporating sources of MBE system, the cell can be used for various kinds of evaporating materials such as Fe, Ga, Zn etc.

2. Low-temperature growth can be achieved by migration effect of ionized atom when thin film grows.

3. Improvement of thin film crystalline is created by ionization.

Product specifications

<Ionization area>
1. Mounting flange: CF114mm
2. Baking: Bakeable at 250℃
3. Shutter: Pneumatic actuated (including ion current monitor)
<K cell area>
1. Mounting flange: CF70mm
2. Capacity of crucible: 5cc made of PBN
3. Heating temperature: Up to 1300℃