This RHEED accommodates bakeable function for UHV, and it can withstand a baking temperature of about 200℃ with the high voltage cable disconnected.
The electron gun is the self-bias type, which provides a very bright spot assuring a stable high resolution pattern. Lead glass is used for the fluorescent view port as protection against X ray hazards. The differential pumping type is also available.
1. Accelerating voltage 30kV
2. Filament Hair pin type
3. Electron beam diameter φ90μm in diameter
(For distance between substrate and surface of fluorescent screen being 400mm)
4. Ultimate pressure 10⁻⁹Pa
5. Baking temperature 200℃
6. Mounting flange CF 114mm OD