Component information

Radial beam source   ER-1000


The electric discharging zone has a sufficiently large space and has no electrode. Therefore stable radical beam is supplied with no contamination after long term plasma discharging.

An optical fiber scope and a spectrometer can be equipped as option. Users can control the amount of radical beam while constantly observing optical intensity spectrum on the display.

Product specifications

1. Radical flux intensity More than 10E15atoms/cm2 sec
2. RF output ~300W (Standard Type) ~500w(High output type)
3. Voltage of ion trapper 600V maximum
4. Mass flow controller 10sccm (optional)
5. Traveling function ±60mm (optional)
6. Mounting flange CF 152mm OD (Standard), CF 70mm and 114mm OD available