Component information
Manipulator MB-4600K
Overview
Since the shaft size is different to customer’s own vacuum chamber configuration, it can be designed according to customer’s requirements.
In addition, the manipulator can also accommodate functions such as substrate heating and cooling etc. on demand.
Product specifications
1. Substrate size 6 inch in diameter
2. Substrate temp up to 1000℃ by Tantalum heater for substrate surface up to 800℃ by lamp heater for substrate surface
3. Movements
±5mm for X axis
±5mm for Y axis
±10mm for Z axis
±3° for tilt
360° for rotation (selected from manual operation or motor-driven operation)
4. Mounting flange CF 305mm OD top-entry
5. Selection of shutter manual or pneumatic operation
