Component information

Beam Flux Monitor   EBM-1000


This monitor is beam intensity measuring instrument, which is nude gauge type. The monitor accommodated transfer function.

Transfer stroke can be determined by chamber dimension.

Product specifications

1. Pressure available for use
2. 1×10⁻¹ to 2.7 x 10⁻⁹Pa
3. Mounting flange CF 114mm OD
4. Transfer stroke to be determined by chamber dimension