Component information
Beam Flux Monitor EBM-1000
Overview
This monitor is beam intensity measuring instrument, which is nude gauge type. The monitor accommodated transfer function.
Transfer stroke can be determined by chamber dimension.
Product specifications
1. Pressure available for use
2. 1×10⁻¹ to 2.7 x 10⁻⁹Pa
3. Mounting flange CF 114mm OD
4. Transfer stroke to be determined by chamber dimension
