Component information
Expendables ECT-203 ECT152
Overview
1. Mounting flanges are CF152mm and CF203mm, and the trap is available for Ultra High Vacuum.
2. The high conductance makes the suitable combination with turbo molecular pump suitable.
3. The liquid nitrogen container is made of SUS316L, and there is no deterioration at heat cycle.
4. The cooling area is very large, consequently water removal and evacuation system of organic deposition equipment are optimum.
Product specifications
ECT-152
1. Mounting flange CF152mm
2. Capacity of LN2 container 3.5 liters
3. Trap dimensions Outer diameter: 300mmTotal length: 212ｍｍ
ECT-203
1. Mounting flange CF203mm
2. Capacity of LN2 container 4.3 liters
3. Trap dimensions Outer diameter:350mmTotal length: 215ｍｍ
・Inlet of LN212.7mm dia.
