Component information
Valved Radical Cell for Selenium EVR-500
Overview
The EVR-500 has high cracking efficiency of Se (selenium) and film formation ca be performed efficiently even with a small amount of material.
Product specifications
1.Temperature: Up to 500oC
2.Capacity: 500 to 2000cc
3.Heater: Sheath heater and cartridge heater
4.Radical flux intensity: More than 1015 atoms/cm2.sec
5.RF output: 100W to 300W (Continuously variable)
6.PBN liner: Attached
7.Mounting flange: 203 mm O.D. CF
8.Shutter: Pneumatic operation
* This product is limited to domestic sales only.
