Component information

The rotary feedthrough is a device that transmits rotary motion into a chamber by a non-contact method, and is developed used in ultra-high vacuum environment.

There are three types:

Manual operation type, pneumatic operation type, and electric operation type.

The rotary feedthrough is tailored to idle when the rotating shaft is overloaded, preventing equipment from damaging.

Model	MB-8600	MB- 8600A	MB-8600M	MB-8700	MB-8700A	MB-8700H
Mounting flange	34 mm CF	34 mm CF	34 mm CF	70 mm CF	70 mm CF	70 mm CF
Driving method	Manual	Pneumatic	Electric	Manual	Pneumatic	Electric
Rotation angle	360o	180o	360o	360o	180o	360o
Drive shaft dia.	6 mm	6 mm	6 mm	6 mm	6 mm	6 mm
Max. torque	0.5 N・.m	0.5 N・m	0.5 N・m	0.5 N・m	0.5 N・m	0.5 N・m
Withstanding vacuum	10-9 Pa	10-9 Pa	10-9 Pa	10-9 Pa	10-9 Pa	10-9 Pa
Bakeable temp.(main body)	200oC	200oC	200oC	200oC	200oC	200oC
Bakeable temp.(drive part)	–	50oC	50oC	–	50oC	50oC