Japanese

Component information

Rotary/Linear Feed-through   MB-8600 and MB-8700

Overview

The rotary feedthrough is a device that transmits rotary motion into a chamber by a non-contact method, and is developed used in ultra-high vacuum environment.

There are three types:

Manual operation type, pneumatic operation type, and electric operation type.

The rotary feedthrough is tailored to idle when the rotating shaft is overloaded, preventing equipment from damaging.

Product specifications

Model MB-8600 MB- 8600A MB-8600M MB-8700 MB-8700A MB-8700H
Mounting flange 34 mm CF 34 mm CF 34 mm CF 70 mm CF 70 mm CF 70 mm CF
Driving method Manual Pneumatic Electric Manual Pneumatic Electric
Rotation angle 360o 180o 360o 360o 180o 360o
Drive shaft dia. 6 mm 6 mm 6 mm 6 mm 6 mm 6 mm
Max. torque 0.5 N・.m 0.5 N・m 0.5 N・m 0.5 N・m 0.5 N・m 0.5 N・m
Withstanding vacuum 10-9 Pa 10-9 Pa 10-9 Pa 10-9 Pa 10-9 Pa 10-9 Pa
Bakeable temp.(main body) 200oC 200oC 200oC 200oC 200oC 200oC
Bakeable temp.(drive part) 50oC 50oC 50oC 50oC

 


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