Product information

Liquid nitrogen-Cooling MBE   EV-100


This model is a standard system for research and production fields of semiconductor devices by using solid cells. Furthermore, it can be used as MOMBE system in comparison with gas source cells.

Product specifications

1. Ultimate pressure 10-8Pa
2. Substrate size 2 inch in diameter
3. Heating temperature 1000ºC
4. Heater type Ta spiral type heater
5. Vacuum pumps IP500L/sec Load lock chamber
6. Ultimate pressure 10-5Pa
7. Vacuum pumps TMP210L/sec and RP162L/min Options
8. RHEED, Radical Beam Source, K cell, EB gun