Product information
Vacuum Evaporator SE-5A
Overview
This vacuum apparatus evaporate Au, Al, etc with ease of operation. Basket type evaporation sources are provided. Level of substrate can adjusted as required, since the substrate is attached on a plate supported by rods. The substrate can be heated up to 500ºC, and its temperature is controlled by a temperature regulator. To evacuate the system, a turbo molecular pump and a rotary pump are used. High vacuum can be achieved in a short time.
Product specifications
1. Ultimate temperature 1.33 x 10-4Pa
2. Size of chamber 220 diameter x 200 (h) mm
3. Chamber material Pyrex
4. Substrate holder
Temperature：300 to 500ºC
Measuring element：T/C (K-type)
Sample size：10 to 50mm
5. Evaporation source Resistant heating (basket type)
6. Output Shutter and source level adjuster attached
7. Vacuum gauge 12V 50A Full range gauge
8. Pumps Turbo Molecular Pump 60L/sec Rotary Pump 50L/min (with OMT)
9. Target size 3″ in diameter
