Product information

Vacuum Evaporator   VX-30


Vacuum Evaporator VX-30 requires no large footprint for installation in your laboratory. The functions are simplified for ease of operation. In addition, this apparatus can achieve high quality performance of epitaxy thin film formed by MBE and MOMBE.

Product specifications

Main chamber
1. Ultimate pressure <1x10-6 2. Substrate size 2 inch in diameter 3. Substrate type Up to 500ºC by lamp type heater, up to 800ºC by Ta spiral type heater 4. Vacuum pumps TMP 210L/sec and RP 162L/min Options 5. Side-entry type K cell Capacity: 1cc Maximum temp: 1600ºC (for about 3 minutes)