Product information
Vacuum Evaporator EG-6
Overview
General
1. The main unit and the power supply are compactly integrated.
2. Front door method is employed and it makes operational performance easy-to-use.
3. This extendable system can be connected with chambers and a glove box as well.
Product specifications
1. Ultimate vacuum pressure： 10-5Pa level
2. Manipulator Substrate size： 100 x 100mm
3. Evaporation source：6sets
4. Evaporation source shutter：Manual / Rotary
5. Thickness monitor：Binary indications
