Product information
Vacuum Evaporator EG-6
![](https://en.1974eiko.co.jp/wpeiko/wp-content/uploads/2019/12/EG-6-278x300.jpg)
Overview
General
1. The main unit and the power supply are compactly integrated.
2. Front door method is employed and it makes operational performance easy-to-use.
3. This extendable system can be connected with chambers and a glove box as well.
Product specifications
1. Ultimate vacuum pressure: 10-5Pa level
2. Manipulator Substrate size: 100 x 100mm
3. Evaporation source:6sets
4. Evaporation source shutter:Manual / Rotary
5. Thickness monitor:Binary indications