Japanese

Product information

Vacuum Evaporator   EP-6

Overview

General

1. The main unit and the power supply are compactly integrated.

2. Front door method is employed and it makes operational performance easy-to-use.

3. This extendable system can be connected with chambers and a glove box as well.

Product specifications

1. Specification Ultimate vacuum pressure: 10-5Pa level
2. Size of substrate holder:1” in diameter available
3. Evaporation source:2 sets of inorganic cell and 2 sets of organic cell
4. Thickness monitor:Binary indications


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