Vacuum Evaporator EP-6
1. The main unit and the power supply are compactly integrated.
2. Front door method is employed and it makes operational performance easy-to-use.
3. This extendable system can be connected with chambers and a glove box as well.
1. Specification Ultimate vacuum pressure: 10-5Pa level
2. Size of substrate holder:1” in diameter available
3. Evaporation source:2 sets of inorganic cell and 2 sets of organic cell
4. Thickness monitor：Binary indications