Product information
Organic EO-5
Overview
This apparatus is designed to perform the following process for the produce of organic EL thin film in an integrated manner without breaking vacuum.
Deposition of organic material
Mask pattering
Evaluation function of element
Product specifications
1. Ultimate pressure 10-5Pa
2. Chamber size 400mm (diameter) x 400mm (height)
3. Substrate maximum size 30mm (square)
4. Number of substrate storage 5 pieces
5. Mask holder 2 pieces, for organic and metal
6. Vacuum pumps TMP 500L/sec and RP162L/min
Properties of Organic EL Device created by EO-5
Data by courtesy of the Professor Shizuo Fujita research laboratory, International Innovation Center, Kyoto University
