Product information

Organic   EO-5


This apparatus is designed to perform the following process for the produce of organic EL thin film in an integrated manner without breaking vacuum.

Deposition of organic material

Mask pattering

Evaluation function of element

Product specifications

1. Ultimate pressure 10-5Pa
2. Chamber size 400mm (diameter) x 400mm (height)
3. Substrate maximum size 30mm (square)
4. Number of substrate storage 5 pieces
5. Mask holder 2 pieces, for organic and metal
6. Vacuum pumps TMP 500L/sec and RP162L/min

Properties of Organic EL Device created by EO-5
Data by courtesy of the Professor Shizuo Fujita research laboratory, International Innovation Center, Kyoto University