Since a sample stage is revolved, consistent evaporations at an organic station and metal station can be performed under a vacuum environment.
This chamber accommodates a front door so that materials exchange and maintenance are ease of operation.
Organic evaporation sources and metal evaporation sources are completely partitioned by a plate, and there is no interference toward the evaporation sources.
Sufficient clearance is ensured to eliminate radiant heat from evaporating sources.
Evaporating sources are available from cell-type source, resistance heating boat, various types of source etc.
2 kinds of sources can be evaporated simultaneously on each station.
Since this system has high extensibility, evaluation chamber, load lock chamber, glove box can be extended.
1. Ultimate pressure 10-5Pa range
2. Substrate size 30mm x 30mm
3. Substrate heating mechanism Up to 300ºC, by lamp heater
4. Evaporation sources
For organic material Selectable from mini-cell, boat cell, micro-cell, and basket.
For metallic material Selectable from lateral-type cell, vertical-type cell, EB gun, and sputter source.
5. Probe mechanism (optional) Fixed measuring position type.
Adjustable measuring position type.