Product information

Sputtering   ES-310


This apparatus accommodates 1 set of 3-inch diameter target. The power supply unit is installed at inner part of chamber supporting stage, and this apparatus is designed compactly with ease of use.

Product specifications

1. Ultimate pressure 2 x 10-5Pa
2. Chamber size 253mm (diameter) x 400mm (height)
3. Substrate size 2 inch in diameter (with shutter function)
4. Sputter source 3 inch in diameter
5. Vacuum pumps TMP 210L/sec and RP 162L/min