This apparatus accommodates 1 set of 3-inch diameter target. The power supply unit is installed at inner part of chamber supporting stage, and this apparatus is designed compactly with ease of use.
1. Ultimate pressure 2 x 10-5Pa
2. Chamber size 253mm (diameter) x 400mm (height)
3. Substrate size 2 inch in diameter (with shutter function)
4. Sputter source 3 inch in diameter
5. Vacuum pumps TMP 210L/sec and RP 162L/min