This system accommodates 1 set of 6-inch sputter source and suitable for large size of a substrate. Since deposition software is supplied as option, the software helps users to make deposition works efficiently.
1. Ultimate pressure 4 x 10-5Pa
2. Chamber size 406mm (diameter) x 600mm (height)
3. Substrate size 6 inch in diameter (with cooling & rotating functions)
4. Sputter source 6 inch in diameter
5. Vacuum pumps TMP 500L/sec and RP 250L/min
6. Deposition software / Thickness monitor