Roll coater ERC-200
This system can deposit a various materials on roll films continuously, using multi sputtering sources.
When depositing, temperature can be variable between -30℃ and -80℃.
For oxides, nitrides etc, the system has construction which accommodates gas flowing zone as separable as possible.
1. Ultimate vacuum pressure in roll chamber 10-5Pa range
Roll diameter 200mm (for both unwinding and winding)
2. Sputter Chamber
Ultimate vacuum pressure in sputter chamber 10-5Pa range
Sputter Source Target size : 250mm×80mm
Deposition roll dimension 380mm in diameter and 200mm in length
Deposition roll temperature -30ºC to 80ºC