Product information

Multi-Chamber system  


We manufacture multi-chamber system, corresponding to customers’ diverse applications and various needs.

We can propose multi-chamber system considering not only technical aspect (thin film analysis, depositions, process etc.) but also customer’s their budget and delivery time. Our own technology on the basis of a wealth of experiences and many business performances in the field of ultra-high vacuum must be satisfied. 

Product specifications

1. Electron beam source and controller
2. Processing chamber
3. Sample stage
4. Preparation chamber
5. Sample transfer chamber
Surface treatment part
6. Treatment chamber
7. Controller
Deposition part 8. Deposition chamber
9. Sample stage
10. Evaporating sources
11. Controller