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Tokyo：03-5297-1031
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Kansai：078-327-7551
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Ibaraki：029-265-7401
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TOP
Products
MBE systems
Sputtering systems
Vacuum Evaporators
EB Evaporators
ALD systems
PXP Coating systems
CVD systems
Organic Deposition systems
Bonding systems
Custom-made systems
Devices for EM
Components
Deposition source cells
EB sources
Sputtering sources
RHEED unit
Manipulator
Film Monitor and Sensor
Radical Beam Source
Ion beam sources
Transfer Rod
Baking
Rotary/Linear Feed-through
Software/controller
Expendables
Technical documents
Contact Us
Company information
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▼ 07_CVD systems
Apperance of products
Product classification
Product names
CVD
EPD-640R
